This book focuses on the concepts and techniques of the various disciplines encompassed by Metal-oxide-semiconductor (MOS) integrated circuit (IC) technology and goes beyond. It includes device physics, wafer processing and circuit design.
Modern MOS technology : processes, devices, and design
Creators
Ong, DeWitt G.
Subject
Metal oxide semiconductors
Integrated circuits
Publisher
McGraw-Hill, 1986
National Library Board Singapore, 1986
Digital Description
application/pdf, ill., charts
Table of Contents
Preface -- 1. Overview of MOS -- 2. Review of semiconductor physics -- 3. Surface properties of silicon -- 4. CV plots -- 5. MOS device physics -- 6. Small-geometry effects -- 7. MOS processes -- 8. MOS wafer fabrication -- 9. MOS digital IC design -- 10. Analog MOS design -- 11. CMOS -- 12. Computer circuit simulation -- 13. Layout, mask, and assembly -- 14. Yield and reliability -- Table of physical constants -- Table of material properties -- Table of conversion constants -- Solutions to selected problems -- Index.
Copyright
All Rights Reserved. National Library Board Singapore 2009.