MEMS : a practical guide to design, analysis, and applications / edited by Jan G. Korvink and Oliver Paul.



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"Micro-electro-mechanical systems"--Cover. Includes bibliographical references and index.

Title
MEMS : a practical guide to design, analysis, and applications / edited by Jan G. Korvink and Oliver Paul.
Artist
Korvink, J. G. (Jan G.)
Subjects
Language
Type
Book
Abstract
Year
2006
Original Publisher(s)
Digital Publisher(s)